KTH Royal Institute of Technology (Sweden)

KTH Royal Institute of Technology is Sweden's oldest and largest technical university with more than 17000 students, about 250 full professors and in total 3000 employees. The School of Information and Communication Technology is located at the new campus in Kista, a centre for Sweden's ICT industry.

www.ict.kth.se/MAP

www.electumlab.se

Fabrication facilities: 1300 m2 clean room (www.electrumlab.se)

• Si, SiC, III-V
• I and G-line steppers
• Sidewall Transfer Lithography
• Full Nano-scale MOSFET process at 100 mm wafers
• MEMS fabrication up to 200 mm wafers (G-line)

Characterization platform

• Physical characterization (HRSEM, FIB, HRTEM, HRXRD, SIMS, AFM, IR-Emission)

• Electrical characterization:

DC
Thermo-chuck up to 300 °C

Current range: 20 fA to 1 A

Voltage range: 1 µV to 300 V

HF/RF

Small signal S-parameter

Frequency range: 1 MHz to 67 GHz

1/f noise

On wafer device characterization

Frequency range: 1 Hz to 100 kHz

CV

Schottky barrier characterzation

MOS characterization

Frequency range: 20 Hz to 1 MHz