Chalmers University of Technology (Sweden)

At Chalmers University of Technology, research and teaching are conducted on a broad front within technology, natural science and architecture. Research work covers everything from mathematics and natural sciences through technology to industrial sciences to social structures. The Department of Microtechnology and Nanoscience (MC2) is doing research and education with focus on future electronics, photonics and micro-/nanosystems. The materials, devices and systems studied find their applications in future systems for wireless communication, data transmission over fibre links, sensor systems, quantum computers and completely new forms of nanoelectronics.

www.mc2.chalmers.se

Processing facilities: 1 200 m2 clean room

• MMIC/Photonics line
• Nanoprocessing
• MEMS line (150 mm wafers)
• JEOL JBX 9300FS (50 or 100 keV accelerating voltage, 4nm min beam diameter, 300mm compatible, 8nm minimum feature size)
• JEOL JBX 5DII